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Wafer/OLEDType
Pioneer 300 02-25 | VIEW : 2,301

Digital Analyzer for Wafer Surface

The Pioneer 300 Wafer Surface Analysis System is specially designed for use in 300 mm
semiconductor wafer processing for quality control. The Pioneer 300 provides quick and
accurate contact angle/surface energy measurements of the wafer surface to adhesion,
cleanliness and surface treatments.

The use of anti-static materials in the Pioneer 300 makes it well suited for semiconductor
applications. The inner portions are specially designed to prevent particulate formation or
contamination and the system can be used to monitor the ultra clean surface processing
of silicon wafers. The position of the sample stage is computer controlled and can be
precisely adjusted along the x-,y-, or z- axis. The user can easily control the position of
the stage to allow for wafer surface mapping. The instrument uses micro-pump controlled
by PC for precise and repeatable liquid drop formation and application. This insures that a
reproducible drop volume is applied to the surface




Applications
1. Coating assessment of the HMDS process.
2. Wafer mapping Display for surface contamination detection.
3. Adhesive and primer preparation.
4. Coating uniformity & Coating quality.
Specifications

Name


Pioneer 300 M (Manual type)
Pioneer 300 A (Automatic type)
(Wafer cleanness and treatment analyzer)

Unit size(L*H*W) in mm


1000*700*750

Weight


70 Kg

Max. Sample size(L*W)in mm


300 mm wafer (4/6/8/12 inch wafer available)

Max. Sample thickness in mm


10

Zoom


6.4 fold

Focus


Internal, ±6 mm

Resolution


768 × 576 NTSC, 16M color

Max measuring speed


30 fr/s(frame grabber) or 90fr/s (digital Camera)

Dispensing type


Automatic (Using a controllable step moter)

Light source


Adjustable White LED Module

Operating system


Windows

Evaluation methods


Static/Dynamic contact angles, Surface Energy

Contact angle


5 ~ 180 °, ±0.1° accuracy

Surface and interfacial tension


10-1~103 mN/m Resolution ±0.5 mN/m

Temperature measurement


External

Accessories


Guide book, Syring and tip set, level, tweezers
Extra Fuse and , Tool box, etc.

Options


External temperature measurement
SPC software

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Mọi chi tiết xin liên hệ:
Liên hệ: Cty Cổ Phần Công Nghệ Hiển Long
Địa chỉ: B40 Khu Kim Sơn, Nguyễn Hữu Thọ - P Tân Phong – Q.7- TP.HCM – VN
Nhân viên kinh doanh: Trần Trường Lâm
Phone : 0949.171.545